The spiro-type polymer having alternate structure of cyclic silphenylenesiloxane and cyclic carbosilane moieties was synthesized by the hydrosilylation polymerization of cyclic silphenylenesiloxane derivative having two allylhydrosilyl groups.The thermal properties of the obtained polymers were investigated by using the thermogravimetric anal. and the differential scanning calorimetry.The obtained spiro-type polymer, P3, exhibited the relatively high glass transition temperature of 77°C and the weight residue at 1000°C of 73 %.In addition, P3 annealed at 200°C was an excellent heat-resistant material insoluble to common solvents.The dielec. constants, ε, of polymer films of P3 and the annealed sample were evaluated by the measurement of refractive indexes estimated from the ellipsometry method.Both samples showed relatively low ε.